Apparatus for suppressing electrification of sample in charged beam irradiation apparatus

ABSTRACT

When a charged beam is irradiated on a sample, charge up of electric charge of the same polarity as that of the charged beam is built up on the sample surface. In order to neutralize the charge up electric charge, an apparatus for suppressing electrification of sample in charged beam irradiation apparatus is provided in which electric charge of opposite polarity to that of the charged beam is generated near the sample surface to neutralize the charged beam or charge up electric charge on the sample surface. The electric charge for neutralization is generated by admitting electric charge from a plasma generation unit to the vicinity of the sample surface ionizing gas generated from the sample surface by causing the charged beam to collide the gas or by irradiating electrons from an electron source on the sample surface. Especially when there is a possibility that impurities other than the electric charge for neutralization affect the sample adversely, an impurity generation source is blind folded with a cover so as not to be seen through from the sample and charged beam so that the impurities may be prevented from impinging upon the sample surface or intersecting the charged beam path.

This application is a continuation of application Ser. No. 08/411,150,filed Mar. 27, 1995, U.S. Pat. No. 5,576,538 which is a continuation ofapplication Ser. No. 08/020,802, filed Feb. 22, 1993, now U.S. Pat. No.5,466,929.

BACKGROUND OF THE INVENTION

The present invention relates to charged beam irradiation apparatus andmore particularly to an apparatus for suppressing electrification of asample in charged beam irradiation apparatus, which electrificationsuppressing apparatus suppresses electrification or charge up generatedon a surface of the sample under irradiation of a charged beam.

For example, then an electronic circuit is formed by irradiating acharged beam on a semiconductor wafer standing for a sample, a samplesurface is charged up by ions implanted in the sample to induce electriccharge of opposite polarity to that of the charge up electric charge inthe opposite side to the sample surface. As the charge up electriccharge grows to exceed a breakdown voltage of the sample, the samplesometimes undergoes dielectric breakdown. Accordingly, for the purposeof neutralizing charge up electric charge generated on the samplesurface, charged particles having opposite polarity to that of thecharge up electric charge must be irradiated on the sample surface.

JP-A-2-87450 discloses a technique of preventing such charge up.According to the technique, electrons emitted from an electron gun aredeflected toward the sample surface so as to be irradiated thereon andcharge up on the sample surface built up positively by a positive ionbeam is neutralized electrically by the electrons.

However, electrons generated from an electron source such as theelectron gun are easy to concentrate at high density but have highenergy which is 100 eV or more, with the result that a positivelycharged up portion can be neutralized sufficiently electrically butbecause of occurrence of a phenomenon that electrons irradiated on theneighborhood of the charge up portion charge the neighborhoodnegatively, the entire sample surface cannot be neutralized properly.

Accordingly, electrons used for neutralization of charge up are requiredto have small energy. Besides, in order to realize sufficientneutralization, electrons are required to exist at high density.

As a method of supplying low energy electrons for the purpose ofneutralizing the sample surface, JP-A-61-47048 discloses a methodutilizing secondary electrons and JP-A-4-51437 discloses a method inwhich electrons are decreased in speed to have low energy. JP-A-1-220350discloses a method in which energy of electrons is lowered especiallyfor the case where a sample is liable to suffer from damage by chargeup.

Practically, however, it is very difficult to concentrate low energyelectrons at high density because the electrons are caused to diffuse byrepulsive action between them.

On the other hand, when a semiconductor wafer coated at its surface withresist is used as a sample, the charged beam irradiation apparatus is ingeneral provided with a cylindrical member called a Faraday cage formeasurement of ion beam current which is arranged near the sample tosurround the ion beam path.

With the sample surface coated with resist, when an ion beam bombardsthe sample surface, such a gas as hydrocarbon is generated therefrom andparticularly the amount of gas generated is large in the initial phaseof bombardment. Structurally, the cylindrical Faraday cage facilitatesrapid diffusion of the generated gas and raises a cause of reducing theeffect of preventing charge up on the sample surface. More specifically,deficiency of gas near the sample surface leads to deficiency of lowenergy electrons generated by ionization of the gas under bombardment ofion beam and useful to neutralize the sample surface. Further, part ormost of gas rapidly diffusing from the vicinity of the sample isdischarged to the outside through an ion beam inlet opening of thecylindrical member and in consequence pressure is abruptly increased atan outside site which is in close proximity to the inlet opening in theinitial phase of ion beam bombardment against the sample surface, sothat the gas is ionized near the outer side of the opening to generateelectrons which in turn combine with positive ions in the ion beam toneutralize particles in the beam. The neutral particles are admittedinto the Faraday cage and therefore electrons and ions generated underthe bombardment of ion beam cannot be detected by the Faraday cage,resulting in errors in a measured value of ion beam current. Since theion beam current is a very important value in controlling the amount ofions implanted in the sample, it must be free from errors as far aspossible.

Therefore, in order that gas generated from the sample surface can beutilized effectively for prevention of charge up on the sample surfaceand reduce measurement errors of ion beam current value can be reduced,it is necessary to suppress diffusion of generated gas from the vicinityof the sample surface as far as possible.

Incidentally, since the amount of electrons generated from only thegenerated gas is deficient to neutralize charge up on the samplesurface, there needs a separate apparatus for generating electrons andirradiating the electrons on the sample surface. Namely, by using boththe electrons generated owing to ionization of the generated gas andelectrons from the electron source, sufficient electrons to neutralizethe sample surface can be obtained. However, the apparatus using thegenerated gas and the electron source in combination in this mannerfaces the following problems. In the method as disclosed inJP-A-61-47048 which utilizes secondary electrons as an electron source,the amount of emitted secondary electrons depends on the surfacecondition of a secondary electron emission electrode (dynode) but thesurface condition is affected by contamination due to, for example,sputtering by ion beam and disadvantageously becomes very unstable.

Further, the electron source uses a filament and tungsten or the likeconstituting the filament per se sometimes behaves as a contaminantsubstance; and besides the life of filament is relatively short, raisinga problem in maintenance that the filament must be exchangedperiodically.

Further, disadvantageously, the function of monitoring the degree ofneutralization of ions caused by the electrons and controlling thesupply amount of electrons properly is insufficient.

In addition, there arise problems that the sample is contaminated byplasma and source gas, the ion beam is contaminated by plasma and sourcegas, and the ion current cannot be measured accurately for a cause of adecrease in the degree of vacuum caused by the source gas.

Especially, as techniques of eliminating the adverse influence due tocontaminant substances of high mass, other than electrons, emitted fromthe electron source, the following prior arts are available.

JP-A-2-54858 describes that in order to concentrate an electron beam forneutralization of ion beam on the neighborhood of a wafer irradiatedwith an ion beam, an electron beam drawn out of an electron source isdeflected by a deflector.

Also, JP-A-3-25846 describes that an electron source is provided at aposition remote from an ion beam irradiation area and electrons aretransported to the ion beam irradiation area through transport meanshaving a low conductance against gas for generation of electrons.

In JP-A-2-54858, the electron source is masked with the deflector tomitigate the problem of contamination but the necessity of the deflectorand a power supply unit for deflection makes the apparatus complicatedand large-sized, raising a problem that reliability and cost performanceare degraded. Especially, in spite of the fact that contaminantsubstance does not impinge directly upon the sample surface, thecontaminant substance collides with ions in a beam when it flies acrossthe ion beam path and disadvantageously it sometimes reaches the sample.

In the apparatus described in JP-A-3-25846, the remote disposition ofthe electron source makes the apparatus large-sized and the necessity ofthe transport means with pressure reduction means makes the apparatuscomplicated to disadvantageously reduce reliability of the apparatus andraise the cost thereof.

SUMMARY OF THE INVENTION

A first object of the invention is to provide an apparatus and methodfor suppressing elecrification of sample in charged beam irradiationapparatus, in which low energy electrons are concentrated at highdensity to suppress charge up generated when an ion beam is irradiatedon a sample.

A second object of the invention is to provide an apparatus and methodfor suppressing electrification of sample in charged beam irradiationapparatus, in which gas generated from the sample surface underbombardment of ion beam is utilized efficiently for neutralizing chargeup on the sample surface and besides errors in measurement of the ionbeam current amount can be minimized.

A third object of the invention is to provide an apparatus and methodfor suppressing electrification of sample in charged beam irradiationapparatus, in which the adverse influence of contaminant substanceparticles generated from an electron source upon the sample can bemitigated as far as possible.

According to a first form of the invention, as an apparatus ofgenerating charged particles for neutralization used for suppressingcharge up built on the sample surface under irradiation of ion beam, aplasma generation source is used which forms a source gas into plasma bymicrowave discharge. In plasma, positive and negative charged particlesare coexistent to provide, as a whole, an electrically neutral state inwhich a phenomenon of diffusion of charged particles due to therepulsive action between them is minimized, so that low energy chargedparticles can be generated at high density. When the plasma exists nearthe charged up sample surface, only a charged up portion of the samplesurface can be neutralized effectively and yet an ion beam per se to beirradiated on the sample through the plama can be neutralized and thenirradiated on the sample. Of course, only electrons necessary forneutralization may be drawn out of the plasma and may be admitted to thevicinity of the sample surface. Accordingly, the first form of theinvention can accomplish the aforementioned first and third objects.

According to a second form of the invention, diffusion of gas dischargedfrom a sample under the bombardment of ion beam to sites distant fromthe vicinity of the sample surface is suppressed to cause the gas tostagnate near the sample surface as far as possible. Consequently, thetime for gas generated from the sample to stagnate near the samplesurface is prolonged, with the result that the amount of gas near thesample surface is increased in the initial phase of ion bombardment andat the same time the gas amount does not decrease abruptly to increasethe amount of electrons stemming from ionization of the gas under thebombardment of ion beam and useful for neutralization of sample surfacepotential, thereby mitigating a decrease in charge up prevention effect.Since rapid diffusion of the gas discharged from the sample to theoutside of the vicinity of the sample surface is suppressed, thedischarge amount of gas to the outside of the Faraday cage is decreasedto reduce the rate of generation of ions and electrons by collision ofgas flowing to the outside of the inlet opening of the Faraday cage withthe ion beam, and errors in measurement of ion beam current can bedecreased correspondingly. The second form of the invention canaccomplish the first and second objects of the invention.

According to a third form of the invention, a neutralization purposecharged particle discharge chamber and a cover at the same potential asthat at the wall surface of an ion beam irradiation chamber are providedin such a manner that the neutralization purpose charged particledischarge chamber cannot be seen through directly from the sample andthe ion beam path, so that charged particles for neutralization areguided to the ion beam irradiation chamber through an opening defined bythe charged particle discharge chamber and the cover. This preventscontaminant particles of, for example, tungsten discharged from theneutralization purpose charged particle discharge chamber from flying tothe sample and prevents the contaminant particles from intersecting theion beam path, thus suppressing the adverse influence of the contaminantparticles upon the sample. And yet, charged particles for neutralizationcan be guided to the ion beam irradiation chamber by potential at thecharged particle discharge chamber and cover.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing the construction of an embodiment accordingto a first form of the invention in which an ion beam is neutralized byplasma.

FIG. 2 is a diagram showing the construction of another embodiment ofthe first form according to the invention in which an ion beam isneutralized by electrons derived from plasma.

FIGS. 3 and 4 are sectional views respectively showing embodiments ofthe invention in which the apparatus of FIGS. 1 and 2 are respectivelycombined with a Faraday cage for ion beam current measurement.

FIG. 5 is a sectional view showing another embodiment of the inventionin which the apparatus of FIG. 2 is provided with a surface electrometerfor semiconductor wafers.

FIG. 6 is a sectional view showing an embodiment of the invention inwhich the apparatus of FIG. 1 is provided with a unit for evacuating rawgas in plasma.

FIG. 7 is a sectional view showing an embodiment of the invention inwhich the apparatus of FIG. 2 is provided with a unit for evacuating rawgas in plasma.

FIG. 8 is a diagram showing the overall construction of a charged beamirradiation apparatus according to the invention.

FIG. 9 is a sectional view showing the main part of an ion beamirradiation apparatus according to a second form of the invention.

FIG. 10 is a sectional view taken on the line II--II of FIG. 9.

FIG. 11 is a diagram showing, for comparison of effects of the inventionwith those of a conventional example, characteristic curves indicativeof the change with time of pressure prevailing interiorly and extriorlyof the Faraday cup.

FIG. 12 is a diagram showing results of electron locus simulation in theembodiments of the invention shown in FIGS. 9 and 10.

FIG. 13 is a plan view of a rotary disc as viewed in the direction ofion beam irradiation in the embodiments shown in FIGS. 9 and 10.

FIG. 14 is a sectional view of an embodiment according to a third formof the invention.

FIG. 15 is a diagram showing results of analysis of electron loci in theembodiment shown in FIG. 14.

FIG. 16 is a diagram of another embodiment according to the third formof the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIG. 8 is a conceptual diagram showing the overall construction of thepresent invention. Referring to the figure, an ion beam, emitted from anion source 30 and accelerated, undergoes mass separation by a magneticfield generated by a magnet 32 for mass separation, and an ion beam ofspecified ion species obtained by the mass separation is deliveredthrough a slit 34 for mass separation. The thus delivered ion beam isadmitted to an ion implantation chamber 35 so as to be implanted into asemiconductor wafer 2 representative of a sample. A plurality of wafers2 are held on a rotary disc 36 along the same circumference. A driveunit 302 rotates the rotary disc 36 at a high speed about the rotationcenter thereof and at the same time the drive unit can be moved, alongwith the rotary disc 36, in the up-and down direction in the illustratedapparatus. This causes the rotary disc 36 to be scanned in twodirections, that is, radial and rotational directions with respect tothe ion beam and as a result, ion implantation into the entire surfaceof all of the wafers 2 held on the rotary disc can be carried outsequentially.

The ion source 30, the wafers 2 and the rotary disc 36 holding them arearranged in the ion implantation chamber 35 which is a vacuum vesselevacuated to vacuum. An apparatus 28 for suppressing electrification ofsample according to the invention is arranged near the wafer 2 tosurround a path through which the ion beam passes.

Embodiments according to a first form will now be described withreference to FIGS. 1 to 7.

In FIG. 1, a platen 1 is fixed on the rotary disc 36 of FIG. 8 and asample or workpiece, for example, a semiconductor wafer 2 is carried onthe platen. An ion beam 3 is irradiated on the wafer 2 to perform such atreatment as implantation of ions into the wafer, etching or sputtering.Plasma 16 is supplied from a plasma source 4 so as to cover the whole ofa path of ion beam 3. The ion beam 3 is neutralized by low energyelectrons at high density contained in the plasma and a neutralized ionbeam is irradiated on the workpiece 2. Consequently, the workpiece 2 canbe prevented from dielectric breakdown due to charge up.

A source gas is supplied from a source gas source 9 to a dischagechamber 5 of the plasma source 4. The source gas is brought into theelectron cyclotron resonance condition under the application of amagnetic field formed by a solenoid coil 11 and under the irradiation ofa microwave 6 to form plasma 14 at high density.

The plasma 14 goes out of a plasma outgoing aperture 15 of the dischargechamber 5 and turns into plasma 16. Since the plasma 16 will not beaccelerated by any electric field, energy of electrons contained in theplasma has a low level of, for example, several of eV or less and theelectrons neutralize the ion beam 3 effectively.

Also, in the plasma 16, the amount of positive ions in the source gassubstantially balances with the amount of space charge due to theelectrons, with the result that diffusion of the electrons attributableto repulsive force between them can be suppressed to confine the plasma16 within the irradiation range of ion beam 3.

Positive ions in the source gas will be deposited on the inner wallsurface of the charged particle beam irradiation chamber but there isfear that they will contaminate the workpiece 2.

Heavy metals will do the greatest damage to the semiconductor wafertypically representative of the workpiece 2. Accordingly, in the presentinvention, a gas not containing any heavy metal components, for example,an inert gas of high purity may preferably be used as the source gas. Inaddition, the discharge chamber 5 is made of such a material notcontaining any heavy metals as boron nitride to prevent discharge ofheavy metals from the discharge chamber 5.

The workpiece 2 is placed at a site which is not directly seen from theplasma source to make it difficult for unexpected heavy metals from thedischarge chamber 5 to reach the workpiece 2.

Microwave 6 is generated by a microwave power supply 7 and admitted tothe interior of discharge chamber 5 by, for example, a waveguide 8 or acoaxial cable. The aforementioned magnetic field may be formed in thedirection of propagation of microwave 6 by exciting the solenoid coil 11with a coil power supply 12 or by means of a permanent magnet.

Electrons stemming from ionization of the source gas by the microwave 6undergo ECR (Electron Cyclotron Resonance) under the influence of themagnetic field and the ionization is promoted. To this end, for example,the microwave 6 is set to have a frequency of 2.45 GHz and the magneticfield inside the discharge chamber 5 is set to about 875 gauss.

FIG. 2 is a partial sectional view of an embodiment of the invention inwhich only electrons are taken out of plasma 14 inside the dischargechamber 5 of FIG. 1.

In FIG. 2, the plasma outgoing aperture 15 in FIG. 1 is replaced with agrid-like electron outgoing aperture 151 and another grid-like electronoutgoing aperture 152 is provided so that between the two, an electricfield may be formed by which electrons are drawn out toward ion beam 3.

With the construction of FIG. 2, only electrons 161 are supplied to theion beam 3 and therefore fear of contamination of workpiece 2 bypositive ions of the source gas can be eliminated. By adjusting theelectric field between the electron outgoing apertures 151 and 152, freesetting of the energy level of supplied electrons 161 can be ensured toadvantage.

FIGS. 3 and 4 are diagrams showing the construction of other embodimentsof the invention in which the apparatus of FIGS. 1 and 2 arerespectively combined with a Faraday cage 17 in order that ion beamcurrent can be measured and at the same time the ion beam current can befed back to the microwave power supply 7 to control the amount of plasma16 or the amount of electrons 161. For convenience sake, descriptionsconcerning FIGS. 3 and 4 will proceed in parallel.

In FIG. 3, plasma 16 is admitted to ion beam 3 through a plasma inletaperture, of the Faraday cage 17, which is in communication with theplasma outgoing aperture 15.

In FIG. 4, electrons 161 are admitted to ion beam 3 through a grid ofthe Faraday cage 17. In FIG. 4, the grid of the Faraday cage 17 fillsthe role of the electron outgoing aperture 152 of FIG. 2.

A permanent magnet 22 and its magnetic path 21 are provided around theouter periphery of the Faraday cage 17 to form a magnetic field in theFaraday cage 17 in a direction coaxial with the ion beam 3 so thatplasma 16 and electrons 161 may be confined within ion beam irradiationspace. A multi-pole line cusp magnetic field can be formed around theouter periphery of the Faraday cage 17 with the aim of suppressing lossof plasma 16 and electrons 161.

Further, a suppressor electrode 18 applied with negative voltage isprovided at an inlet port for ion beam 3 in order to prevent theincoming of electrons contained in the ion beam 3.

An earth electrode 20 provided above the suppressor electrode 18 limitsthe ion beam 3 and at the same time prevents the irradiation of ion beam3 on the suppressor electrode 18.

In principle, a current due to plasma generated in the discharge chamber5 flows through a current path set up between the discharge chamber 5and workpiece 2 and therefore can be detected by means of an ammeter 23.

A current component due to the ion beam 3 also passes through theammeter 23. The ion beam current and the plasma current flow in oppositedirections and therefore an indication value on the ammeter 23 becomeszero when the ion beam current is completely neutralized by electrons inthe plasma. The ion beam current can be detected separately by means ofan ammeter 24 as shown in the figure.

Accordingly, in the invention, by feeding an output of the ammeter 23back to the microwave power supply 7 to control the density of plasma 16such that the output of the ammeter 23 becomes zero, the ion beam can beneutralized perfectly.

Practically, depending on objects and characteristics of apparatus, theoutput of the ammeter 23 may be displaced suitably from zero.

Generally, ionization of the source gas is carried out by utilizing theaforementioned ECR and the plasma density obtained in that case isdetermined by microwave intensity and magnetic field intensity.

Accordingly, it might be envisaged that an indication value on theammeter 23 is fed back to the magnetic field intensity to obtain similareffects but in this case there arises a problem that the resonancefrequency of ECR also changes sensitively with the control of magneticfield intensity, leading to an unstable operation. More specifically,since the plasma output characteristic with respect to the change ofmagnetic field intensity has a peak, inversion of the gradient (gain) ofresonance characteristic occurs on the upper side and lower side of theresonance frequency range and for example, if the gradient is stable onthe upper side, it becomes unstable on the lower side, thus making itimpossible to apply sufficient feedback near the resonance frequency.Contrary to this, when the output of the ammeter 23 is fed back to themicrowave power supply 7, the resonance frequency less varies and stableoperation can be obtained.

In accordance with another embodiment, potential on the surface ofworkpiece 2 can be fed back to the microwave power supply 7 in place ofthe output of the ammeter 23 and this method can be applied to the casewhere the workpiece 2 is a semiconductor wafer.

Generally, there exists on the surface of a semiconductor wafer a devicearea which is isolated by, for example, a silicon oxide film and chargeup is built on this area by ion beam irradiation. With ion beam 3neutralized perfectly, the amount of charge up becomes zero.Accordingly, by detecting surface potential on the wafer and feeding itback to the microwave power supply 7, the ion beam can also beneutralized perfectly. An embodiment to this effect is shown in FIG. 5.

In FIG. 5, a rotary disc 36 is rotated to sequentially move a pluralityof wafers 41 carried thereon to a position on which ion beam 3 isirradiated. Surface potential on a Wafer 41 having gone throughirradiation of ion beam 3 is detected by means of an electrometer 42 andfed back to the microwave power supply.

In FIGS. 1 to 5, a small amount of raw gas which has not turned intoplasma is sometimes mixed with plasma 16 supplied from the dischargechamber 5 and is deposited on the workpiece 2 to contaminate itdetrimentally.

FIGS. 6 and 7 are sectional views of embodiments of the inventioncomprising means for eliminating the raw gas so as to further improvethe apparatus of FIGS. 1 to 5.

In FIGS. 6 and 7, raw gas not turning into plasma is evacuated throughan evacuation pipe 26 by means of an evacuation unit 27. At that time,plasma 14 is confined within magnetic fields formed by solenoid coils 11and 25 and as a result only the raw gas not turning into plasma can beevacuated.

Technical effects brought about by the embodiments of the inventionshown in FIGS. 1 to 7 can be summarized as follows.

(1) Since electrons necessary for neutralization of an ion beam aretaken out of plasma based on the electron cyclotron resonance, theelectrons can be supplied stably.

(2) In the plasma, electrons and ions are coexistent and therefore spacecharges associated therewith can be cancelled out, so that the ion beamcan be neutralized efficiently by supplying low energy electrons at highdensity.

(3) Energy of electrons is sufficiently low, amounting up to several ofeV at the most and therefore danger to damage of workpieces of lowbreakdown voltage such as semiconductor wafers can be reduced.

(4) In contrast to the conventional apparatus, an electron source usinga filament is not employed and therefore a workpiece such as asemiconductor wafer can be free from contamination attributable to thefilament and exchange of filament can be unneeded, thus prolonging thelife of apparatus, promoting cleanness of apparatus and making apparatusmaintenance-free.

(5) Since an inert gas of high purity is used as the source gas ofplasma, contamination attributable to the source gas, especially,contamination attributable to heavy metals can be prevented.

(6) By using the plasma source in combination with a Faraday cage, theion beam can be measured accurately.

(7) By feeding a value of current flowing into the workpiece or chargeup potential on the workpiece back to the microwave power supply,perfect ionization of the ion beam can be accomplished automatically.

(8) By setting up a suitable magnetic field in the Faraday cage, plasmaor electrons can be confined within a space above the workpiece.

(9) By evacuating raw gas from the discharge chamber of the plasmasource, leakage of the raw gas to the workpiece can be prevented toprevent the workpiece from being contaminated.

Embodiments according to a second form of the invention will now bedescribed with reference to FIGS. 9 to 13.

FIGS. 9 and 10 are diagrams showing a part corresponding to theapparatus 28 according to the invention shown in FIG. 8 and an ion beamcurrent measuring system associated with the part. In the figures, anion beam is shaped by an aperture 20 at earth potential and irradiatedon a wafer 2 through a suppression electrode 18 and a cylindrical member105 serving as a Faraday cage. Formed on the surface of the wafer 2 is afilm or layer called resist. Current Iw caused by bombardment of the ionbeam upon the wafer 2 flows through ion beam ammeters 23 and 24. Whenthe wafer 2 is bombarded with the ion beam, reflection ions, secondaryelectrons and secondary ions are generated causing current Ih whichflows through the ion ammeter 23. With the wafer 2 bombarded with theion beam, a gas, mainly a hydrocarbon gas, is generated from the surfaceof the wafer. The generation of the gas is remarkable in the initialphase of ion beam bombardment. When the gas collides with the ion beam,it is ionized to generate ions and electrons. The ions and electrons arecaptured by the cylindrical member 105 to thereby cause current Id whichflows through the ammeter 23. Ion beam current is represented by the sumof Iw, Ih and Id.

The suppression electrode 18 is supplied with a negative voltage and ittherefore prevents electrons in the ion beam from entering thecylindrical member 105 and prevents electrons in the cylindrical member105 from going out of the cylindrical member through an ion beam inlet.

The cylindrical member 105 is partitioned in the direction of ion beamto form a plurality of small rooms 111. Most of gas discharged from thesample 2 under the ion beam bombardment enters the small rooms 111 andthen goes out slowly. Accordingly, diffusion of the gas into thevicinity of the surface of sample 2 is suppressed or retarded ascompared to the case where the small rooms are not provided. In otherwords, the time for the gas to stagnate near the surface of sample 2 isprolonged. As a result, the amount of gas prevailing near the surface ofsample 2 in the initial phase of ion beam bombardment is increased andis not decreased abruptly to permit the gas to be ionized under thebombardment of ion gas, so that the amount of electrons usfeful toneutralize sample surface potential to prevent the charge up preventioneffect from being degraded. In addition, since abrupt diffusion of gasdischarged from the sample 2 into the outside of the vicinity of thesample surface can be suppressed, the gas discharges slowly to theoutside of the cylindrical member 105 through the ion beam inletthereof. In consequence, the amount of gas discharge to the outside ofthe cylindrical member 105 in the initial phase of ion bombardment isdecreased to reduce the chance that ions and electrons are generatedexteriorly of the cylindrical member 105 under the ion beam bombardmentand errors in measurement of ion beam current can be decreasedcorrespondingly.

FIG. 11 shows the change of pressure with time near the sample surfaceand in the neighborhood of the ion beam inlet which is outside thecylindrical member. Represented by "inside" is data indicative of thetime-varying change of pressure near the sample surface and by "outside"is data indicative of the time-varying change of pressure in theneighborhood of the ion beam inlet which is outside the cylindricalmember. As is clear from the data, while in the case of a conventionalexample the pressure near the sample surface exhibits a peak in theinitial phase of ion beam bombardmemt and then decreases abruptly, thepressure in the case of an example of the invention exhibits a peakvalue higher than that of the conventional example in the initial phaseof ion bombardment and thereafter decreases gradually while maintaininga higher level. On the other hand, the pressure in the neighborhood ofthe beam inlet which is outside the cylindrical member maintains a levelslighty lower than that near the sample surface and changes with time insubstantially the same way as the pressure near the sample surface inthe case of the conventional example but in the example of the presentinvention the pressure in the neighborhood of the beam inlet which isoutside the cylindrical member is very low in the initial phase of ionbeam bombardment in comparison with that of the conventional example andthereafter remains almost unchanged.

In order to obtain the gas stagnation effect, the inner wall of thesmall rooms 111 may be made to be uneven or instead of the provision ofsmall rooms 111, the interior of the cylindrical member may be filledwith a porous material such as active carbon.

Formed in the side of the cylindrical member is an opening at whichthere is provided a unit for generating a charged particle beam havingopposite polarity to that of the ion beam, that is, an electron beam. Inthe unit, a filament 113 serving as an electron source is maintained atnegative potential which is several volts and electrons generated fromthe filament are drawn out as an electron beam by means of a draw-outelectrode 114 maintained at potential being about 1 kilovolt. Electrodes115 and 112 for electron deflection are maintained at earth potential orat the same potential as that of the filament and the electron beam isdeflected by a voltage between these electrodes and draw-out electrode114 so as to be directed to the surface of the sample 2. Irradiation ofthe sample surface with electrons is useful for prevention of charge updue to irradiation of the sample surface with the ion beam, that is,neutralization of potential on the sample surface.

FIG. 12 shows results of simulation of loci of electrons directed to thesample surface. In FIG. 12, only one electron beam generation unit isdepicted but practically, another electron beam generation unit isprovided at a position symmetrical to the illustrated electron beamgeneration unit with reference to the center line. Accordingly, electronlocus simulation was effected on the presumption that the two electronbeam generation units existed but in FIG. 12, only the half withreference to the center line is illustrated.

As described previously, the electrodes 115 and 112 for deflection aremaintained at earth potential or at the same potential as that of thefilament and any special power supply for electron deflection cantherefore be dispensed with.

The filament 113 is located at a site which cannot be seen directly fromthe surface of the sample 2 and accordingly the sample surface can beprevented from being contaminated with vaporized substances generatedfrom the filament. An electron passage aperture in the draw-outelectrode 114 is made to be as thin as possible and as long as possible.This reduces the evacuation conductance of the electron passage apertureto reduce the chance that gas generated from the sample reaches thefilament 113 and reduce a decrease in life of the filament.

The filament 113 is opened largely to vacuum inside the vacuum chamber35 of FIG. 8. Therefore, the evacuation conductance of a path by way ofwhich the filament communicates with vacuum via a space opened to thevacuum chamber is larger than the evacuation conductance of a path byway of which the filament communicates with vacuum via the electronpassage aperture in the draw-out electrode, thus reducing the chancethat the filament contacts gas molecules and further reducing a decreasein life of the filament.

An ion beam outlet opening 117 or an opening nearby the sample of thecylindrical member 105 has a cross-sectional form which is, as shown inFIG. 13, more widened in a direction in which the sample is scanned byrotation of the rotary disc 36, that is, in the circumferentialdirection of the rotary disc than in the radial direction of the rotarydisc. Ion beam 3 is irradiated on the sample 2 through an approximatecenter of the rectangular opening. Electrons are irradiated on thesample 2 through an approximate entirety of the opening 117. With thisconstruction, a charge up portion generated on the surface of the sampleunder the bombardment of ion beam is moved, while being neutralizedinsufficiently by electrons, in the circumferential direction as therotary disc 36 rotates and even after having escaped from theirradiation range of ion beam, it remains irradiated with electronsthrough the rectangular opening 117 which is elongated in the rotationdirection, whereby neutralization of the charge up portion havingescaped from the irradiation range of ion beam can be realized byelectrons 118 irradiated through the opening 117 as shown in FIG. 9.

In the embodiment of FIG. 9, a current value on the ammeter 23 may befed back to a power supply 106 of the filament 113 to effectneutralization of the sample through feedback control as explained withreference to FIGS. 3 and 5. By virtue of this feedback control, properneutralization can be realized by both the electrons generated byionization of generated gas and electrons irradiated from the electronsource.

In FIG. 9, the plasma generation source as shown in FIGS. 1 to 5 may beused in place of the electron source using the filament.

Embodiments of the invention according to a third form will now bedescribed with reference to FIGS. 14 to 16.

FIG. 14 is a sectional view showing an embodiment of an apparatus forsuppressing electrification in charge beam irradiation apparatusaccording to the invention.

An ion beam 3 is passed through a grounded aperture 20 and a suppressorelectrode 18 at negative potential and is irradiated on a sample 2.

A disc 36 and a Faraday cage 105 constitute a Faraday cup which capturesion beam 3 and ion beam ammeters 23 and 24 measure a current of ionbeam.

Provided laterally of the Faraday cage 105 is an electron source 107which includes a filament 113 and a cylindrical electron draw-outelectrode 114.

Electrons emitted from the filament 113 are accelerated by the draw-outelectrode 114 and go out of an opening of a cover 109 so as to besupplied to a sample 2 on the disc 36 of an implantation chamber.

The cover 109 is connected to the Faraday cage 105 and grounded throughthe ion beam ammeter 24.

The draw-out electrode 114 is connected to an acceleration power supply120 to form a positive electric field near the opening of the cover 109,so that electrons are deflected toward the sample 2 as shown in thefigure.

Mass of tungsten particles emitted from the filament 113 and ofcontaminant particles generated by ionization of residual gas is farheavier than that of an electron and therefore these contaminantparticles go straightforwards without being affected by the positiveelectric field near the opening of the cover 109 and are capturedthereby.

Thus, the size of cover 109 is made to be sufficiently large to coverthe draw-out electrode 114 in order that the filament 113 cannot be seenfrom the sample 2 and ion beam 3, and the cover surface is so inclinedas to narrow the opening slightly in order that particles of substancessputtered from the cover 109 under the bombardment of contaminantparticles can be prevented from reaching the sample 2.

As described above, in the present invention, electrons can be deflectedtoward the workpiece 2 without applying any deflection voltage and atthe same time contaminant particles can be captured efficiently by meansof the cover 109.

The cover is made of a material of non-heavy metal such as silicon,carbon, aluminum or a synthetic substance of them to prevent any heavymetal particles from being sputtered under the bombardment ofcontaminant particles.

FIG. 15 shows results of analysis of the deflected condition ofelectrons.

Shown in FIG. 15 is the case where two pairs of filament 113, draw-outelectrode 114 and cover 109 are provided at upper and lower sites of theapparatus.

It will be seen that electrons are caused to pass through the opening ofthe cover 109 and to be deflected efficiently toward the sample 3 by apositive electric field formed by an accelerating voltage of thedraw-out electrode 114.

Since in the invention electrons are deflected by the cover 109 at zeropotential (earth), the power supply for deflection can be omitted.

In order to capture particles of substances caused to sputter under thebomardment of the contaminant particles, a bent portion 109a as shown isprovided at the edge of the opening of cover 109.

FIG. 16 is a sectional view showing an embodiment of the invention inwhich an electrification suppressing apparatus based on plasma isprovided in an ion implantation chamber of an ion implantationapparatus.

In the case where plasma is used for charge up suppression, a plasmasource 207 is mounted to the sidewall of a Faraday cage 105 as in thecase of FIG. 14.

Thermions emitted from a filament 113 in an arc chamber 208 cause a gassuch as Ar or Xe fed from a gas bomb 220 to arc-discharge and turn intoplasma.

Plasma can also be generated by a microwave, radio frequency or hollowtype plasma generator. An ion beam or an electron beam can also be drawnout of the plasma.

The plasma is drawn by an electric field of power supply 220 applied tothe arc chamber 208 and passes by a cover 209 provided near the outletto move into the Faraday cage 105. The cover 209 is connected to theFaraday cage 105 and so maintained at earth potential.

The electric field by the power supply 220 spreads into a gap betweenthe outlet of arc chamber 208 and cover 209 to guide plasma into theFaraday cage 105 effectively.

Contaminant substance such as sputtered matter scattering from theinterior of the arc chamber 208 goes straightforwards and impinges uponthe cover 209 so as to be captured thereby, thus being prevented fromintruding into the Faraday cage 105. Thus, the cover 209 is so sizedthat ion beam 3 and filament 113 cannot be seen through from the sample2.

The cover 209 is so configured that its inner surface is inclined tomake it difficult for the contaminant substances to diffuse into theFaraday cage. In some cases, ultraviolet rays emitted from plasma affectthe sample adversely but the ultraviolet rays can be shielded by thecover 209 in a similar way. When the cover 209 is made of a materialsuch as glassy carbon of high purity, it will not be eroded by not onlyplasma but also ultraviolet rays.

As described above, in the present invention, plasma as well as ions andelectrons in the plasma are drawn out by means of the cover 209 at zeropotential (earth) and therefore the power supply for deflection can beomitted to simplify the apparatus; and besides contaminant particles canbe captured efficiently by the cover 209.

We claim:
 1. An apparatus for enabling neutralization of a radiated ionbeam comprising:an apparatus for radiating electrons; a first electrodedisposed with respect to said electron radiating apparatus for enablingacceleration of said electrons therebetween and in a direction towardsaid ion beam; a conductive member disposed at least with respect tosaid first electrode for enabling deceleration of said electronstherebetween and in a direction toward said ion beam; and a capturecover member disposed with respect to said conductive member forsubstantially preventing contaminant substance moving toward the ionbeam from impinging with the ion beam; wherein said electrons radiatedfrom electron radiating apparatus, accelerated by said first electrodeand decelerated by said conductive member are combined with said ionbeam so as to enable neutralization of said ion beam.
 2. An apparatusaccording to claim 1, wherein said first electrode has a first potentialwith respect to the potential of said apparatus for radiating electronsand said conductive member has a second potential smaller than saidfirst potential.
 3. An apparatus according to claim 2, wherein saidsecond potential of said conductive member is closer to the potential ofsaid electron radiating apparatus than to said first potential of saidfirst electrode.
 4. An apparatus according to claim 3, wherein saidapparatus for radiating electrons has a potential of 10 volts, saidfirst electrode has a first potential of substantially 1 kilovolt andsaid conductive member has a potential of 0 volts.
 5. An apparatusaccording to claim 1, wherein said conductive member includes a memberfor deflecting said electrons so as to combine with said ion beam in anon-perpendicular direction to a direction of radiation of said ionbeam.
 6. An apparatus according to claim 1, wherein said apparatus forradiating electrons includes a filament for radiating electronstherefrom.
 7. An apparatus according to claim 1, wherein said ion beamis directed toward a sample and said conductive member includes a memberfor deflecting said electrons in a direction toward said ion beam andsaid sample.
 8. An apparatus according to claim 1, wherein saidconductive member is a second electrode and said capture cover memberforms a portion of said second electrode.
 9. A method for neutralizationof an ion beam radiated in a first direction, comprising the stepsof:radiating electrons; allowing said electrons to pass through an areawhile prohibiting contaminant substance to pass therethrough;accelerating said radiated and passed electrons in a second directiontransverse to said first direction of said ion beam; decelerating saidaccelerating electrons in said second direction, and capturingcontaminant substance so as to substantially prevent contaminantsubstance which moves in said second direction toward said ion beam fromimpinging with said ion beam; and supplying said decelerating electronsto said ion beam so as to combine therewith and enable neutralization ofsaid ion beam.
 10. A method according to claim 9, wherein the step ofradiating electrons includes utilizing a first electrode disposed withrespect to said electron radiating apparatus for enabling accelerationof Said electrons therebetween and in a direction toward said ion beam,and the step of decelerating includes utilizing a conductive memberdisposed at least with respect to said first electrode for enablingdeceleration of said electrons therebetween and in a direction towardsaid ion beam.
 11. A method according to claim 10, wherein said firstelectrode has a first potential With respect to the potential of saidapparatus for radiating electrons and said conductive member has asecond potential smaller than said first potential.
 12. A methodaccording to claim 11, wherein said second potential of said conductivemember is closer to the potential of said electron radiating apparatusthan to said first potential of said first electrode.
 13. A methodaccording to claim 12, wherein said apparatus for radiating electronshas a potential of 10 volts, said first electrode has a first potentialof substantially 1 kilovolt, and said conductive member has a potentialof 0 volts.
 14. A method according to claim 10, wherein said conductivemember includes a member for deflecting said electrons so as to combinewith said ion beam in a non-perpendicular direction to a direction ofradiation of said ion beam.
 15. A method according to claim 10, whereinsaid apparatus for radiating electrons includes a filament for radiatingelectrons therefrom.
 16. A method according to claim 10, wherein saidion beam is directed toward a sample and said conductive member includesa member for deflecting said electrons in a direction toward said ionbeam and said sample.
 17. A method according to claim 10, wherein saidconductive member is a second electrode and said capture cover memberforms a portion of said second electrode.
 18. A method forneutralization of an ion beam, comprising the steps of:ionizing a sourcegas to form electrons and ions; accelerating said electrons of theformed electrons and ions; decelerating said accelerated electrons; andsupplying only said decelerated electrons to the ion beam so as toenable neutralization of the ion beam.
 19. An apparatus for enablingneutralization of ion beam, comprising:means for ionizing a gas sourceto form electrons and ions; means for accelerating said electrons of theformed electrons and ions; means for decelerating said acceleratedelectrons; and means for supplying only said decelerated electrons tothe ion beam so as to enable neutralization of the ion beam.